• DocumentCode
    3688280
  • Title

    Impacts of tapered sidewall profiles with high aspect ratio on subwavelength grating structure

  • Author

    W. X. Yu;D. C. Wu;Y. Yi

  • Author_Institution
    Integrated nano optoelectronics laboratory, University of Michigan, United States of America
  • fYear
    2015
  • Firstpage
    166
  • Lastpage
    167
  • Abstract
    We have numerically demonstrated the significant impacts on the resonance mode characteristics of subwavelength grating structures due to tapered sidewall profile and high aspect ratio, which is normally obtained from CMOS-compatible nanoelectronic fabrication processes.
  • Keywords
    "Gratings","Photonics"
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2015
  • ISSN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/IPCon.2015.7323730
  • Filename
    7323730
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3688280