Title :
High performance NEMS devices for sensing applications
Author :
Thomas Ernst;Sebatien Hentz;Julien Arcamone;Vincent Agache;Laurent Duraffourg;Issam Ouerghi;Willy Ludurczak;Carine Ladner;Eric Ollier;Philippe Andreucci;Eric Colinet;Pierre Puget
Author_Institution :
CEA-LETI MINATEC Campus |
Abstract :
NEMS based sensors open several opportunities for integrated solutions in emerging domains as chemical analysis and life science. With critical dimensions ranging between 10 and 100 nm, those devices can be made at the VLSI scale, possibly co-integrated with CMOS and are well suited for autonomous, highly sensitive or dense sensors. Several applications will be presented, as complex gas portable recognitions systems, mass spectrometry, or bio-sensors.
Keywords :
"Sensor arrays","Resonant frequency","Frequency measurement","Gas detectors","Biosensors","Silicon"
Conference_Titel :
Solid State Device Research Conference (ESSDERC), 2015 45th European
Print_ISBN :
978-1-4673-7133-9
Electronic_ISBN :
2378-6558
DOI :
10.1109/ESSDERC.2015.7324706
