• DocumentCode
    3688973
  • Title

    High performance NEMS devices for sensing applications

  • Author

    Thomas Ernst;Sebatien Hentz;Julien Arcamone;Vincent Agache;Laurent Duraffourg;Issam Ouerghi;Willy Ludurczak;Carine Ladner;Eric Ollier;Philippe Andreucci;Eric Colinet;Pierre Puget

  • Author_Institution
    CEA-LETI MINATEC Campus |
  • fYear
    2015
  • Firstpage
    31
  • Lastpage
    35
  • Abstract
    NEMS based sensors open several opportunities for integrated solutions in emerging domains as chemical analysis and life science. With critical dimensions ranging between 10 and 100 nm, those devices can be made at the VLSI scale, possibly co-integrated with CMOS and are well suited for autonomous, highly sensitive or dense sensors. Several applications will be presented, as complex gas portable recognitions systems, mass spectrometry, or bio-sensors.
  • Keywords
    "Sensor arrays","Resonant frequency","Frequency measurement","Gas detectors","Biosensors","Silicon"
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference (ESSDERC), 2015 45th European
  • ISSN
    1930-8876
  • Print_ISBN
    978-1-4673-7133-9
  • Electronic_ISBN
    2378-6558
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2015.7324706
  • Filename
    7324706
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3688973