Title :
UTBB FDSOI: Evolution and opportunities
Author :
Thomas Skotnicki;Stephane Monfray
Author_Institution :
STMicroelectronics, 850 rue Jean Monnet 38920 Crolles cedex, France
Abstract :
As today´s 28nm FDSOI technology is at the industrialization level, this paper aims to summarize the key advantages allowed by the thin BOX (Buried Oxide) of the FDSOI, through the technology evolution but also through new opportunities, wider than logic applications and extending the possibility offered by the technology.
Keywords :
"Decision support systems","Hafnium"
Conference_Titel :
Solid State Device Research Conference (ESSDERC), 2015 45th European
Print_ISBN :
978-1-4673-7133-9
Electronic_ISBN :
2378-6558
DOI :
10.1109/ESSDERC.2015.7324717