• DocumentCode
    3689036
  • Title

    Low-frequency noise in bare SOI wafers: Experiments and model

  • Author

    Luca Pirro;Irina Ionica;Sorin Cristoloveanu;Gérard Ghibaudo

  • Author_Institution
    Univ. Grenoble Alpes, IMEP-LAHC, F-38000 Grenoble, France CNRS, IMEP-LAHC, F-38000 Grenoble, France
  • fYear
    2015
  • Firstpage
    286
  • Lastpage
    289
  • Abstract
    Noise measurements are efficient for interface trap density characterization in MOSFETs and can be extended to bare silicon-on-insulator wafers. A physical model to explain the experimental results will be presented. The impact of measurement parameters, like die area and probe distance, is discussed comparing experimental and calculated characteristics. Important clarifications concerning the effective die area contributing to noise response will be pointed out.
  • Keywords
    "Probes","Current measurement","Silicon-on-insulator","Noise measurement","Low-frequency noise","Silicon","MOSFET"
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference (ESSDERC), 2015 45th European
  • ISSN
    1930-8876
  • Print_ISBN
    978-1-4673-7133-9
  • Electronic_ISBN
    2378-6558
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2015.7324770
  • Filename
    7324770