Title :
Low-frequency noise in bare SOI wafers: Experiments and model
Author :
Luca Pirro;Irina Ionica;Sorin Cristoloveanu;Gérard Ghibaudo
Author_Institution :
Univ. Grenoble Alpes, IMEP-LAHC, F-38000 Grenoble, France CNRS, IMEP-LAHC, F-38000 Grenoble, France
Abstract :
Noise measurements are efficient for interface trap density characterization in MOSFETs and can be extended to bare silicon-on-insulator wafers. A physical model to explain the experimental results will be presented. The impact of measurement parameters, like die area and probe distance, is discussed comparing experimental and calculated characteristics. Important clarifications concerning the effective die area contributing to noise response will be pointed out.
Keywords :
"Probes","Current measurement","Silicon-on-insulator","Noise measurement","Low-frequency noise","Silicon","MOSFET"
Conference_Titel :
Solid State Device Research Conference (ESSDERC), 2015 45th European
Print_ISBN :
978-1-4673-7133-9
Electronic_ISBN :
2378-6558
DOI :
10.1109/ESSDERC.2015.7324770