DocumentCode
3689036
Title
Low-frequency noise in bare SOI wafers: Experiments and model
Author
Luca Pirro;Irina Ionica;Sorin Cristoloveanu;Gérard Ghibaudo
Author_Institution
Univ. Grenoble Alpes, IMEP-LAHC, F-38000 Grenoble, France CNRS, IMEP-LAHC, F-38000 Grenoble, France
fYear
2015
Firstpage
286
Lastpage
289
Abstract
Noise measurements are efficient for interface trap density characterization in MOSFETs and can be extended to bare silicon-on-insulator wafers. A physical model to explain the experimental results will be presented. The impact of measurement parameters, like die area and probe distance, is discussed comparing experimental and calculated characteristics. Important clarifications concerning the effective die area contributing to noise response will be pointed out.
Keywords
"Probes","Current measurement","Silicon-on-insulator","Noise measurement","Low-frequency noise","Silicon","MOSFET"
Publisher
ieee
Conference_Titel
Solid State Device Research Conference (ESSDERC), 2015 45th European
ISSN
1930-8876
Print_ISBN
978-1-4673-7133-9
Electronic_ISBN
2378-6558
Type
conf
DOI
10.1109/ESSDERC.2015.7324770
Filename
7324770
Link To Document