• DocumentCode
    3689785
  • Title

    Graphene wires as alternative interconnects

  • Author

    I. Asselberghs;M. Politou;B. Soree;S. Sayan;D. Lin;P. Pashaei;C. Huyghebaert;P. Raghavan;I. Radu;Z. Tokei

  • Author_Institution
    Imec, Leuven, Belgium
  • fYear
    2015
  • fDate
    5/1/2015 12:00:00 AM
  • Firstpage
    317
  • Lastpage
    320
  • Abstract
    In this paper, we evaluate the material properties of graphene and compare with Cu in order to assess the potential application of graphene to replace copper wires in BEOL interconnects. Based on circuit and system-level simulations, high restrictions are imposed to graphene with respect to contact resistance and mean free path. Experimentally we measure, a mean-free-path (MFP) of ~150 nm, which exceeds the value for Cu. However, contact engineering will be the key issue for integration of graphene as interconnect.
  • Keywords
    "Decision support systems","Graphene","Wires"
  • Publisher
    ieee
  • Conference_Titel
    Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015 IEEE International
  • ISSN
    2380-632X
  • Electronic_ISBN
    2380-6338
  • Type

    conf

  • DOI
    10.1109/IITC-MAM.2015.7325590
  • Filename
    7325590
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3689785