Simple de-embedding and simulation technique to find permittivity with a THz vector network analyser

A simple and fast method for measuring the dielectric constant with a THz vector network analyser (VNA) has been developed. A numeric de-embedding technique removes free-space propagation effects, then simulation of Maxwell´s equations simultaneously fits both permittivity and thickness to measured scattering parameters. Results are presented for semiconductor and dielectric samples within the frequency range 750 GHz to 1.1 THz, showing excellent agreement with prior work. A statistical analysis of uncertainty is performed, which demonstrates the robustness of our method.