• DocumentCode
    3691634
  • Title

    Terahertz imaging with micro-bridge structure detector array and 2.52THz far infrared laser

  • Author

    Jun Wang;Jun Gou;Weizhi Li;Yadong Jiang

  • Author_Institution
    State Key Lab of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054 P. R. China
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A room temperature operating terahertz (THz) detector with low thermal conductive micro-bridge structure is presented using metal thin film as THz wave absorber. Vanadium oxide is acted as thermal sensitive material and |TCR| of the film is ~2%/K. The detector array is fabricated on silicon substrate with read-out integrate circuit. THz wave transmission imaging could be obtained with the micro-bridge focal plane array and 2.52THz far infrared CO2 pumped laser.
  • Keywords
    "Detectors","Arrays","Imaging","Plasma temperature","Interference","Temperature sensors","Photothermal effects"
  • Publisher
    ieee
  • Conference_Titel
    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on
  • ISSN
    2162-2027
  • Electronic_ISBN
    2162-2035
  • Type

    conf

  • DOI
    10.1109/IRMMW-THz.2015.7327891
  • Filename
    7327891