DocumentCode
3691634
Title
Terahertz imaging with micro-bridge structure detector array and 2.52THz far infrared laser
Author
Jun Wang;Jun Gou;Weizhi Li;Yadong Jiang
Author_Institution
State Key Lab of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054 P. R. China
fYear
2015
Firstpage
1
Lastpage
2
Abstract
A room temperature operating terahertz (THz) detector with low thermal conductive micro-bridge structure is presented using metal thin film as THz wave absorber. Vanadium oxide is acted as thermal sensitive material and |TCR| of the film is ~2%/K. The detector array is fabricated on silicon substrate with read-out integrate circuit. THz wave transmission imaging could be obtained with the micro-bridge focal plane array and 2.52THz far infrared CO2 pumped laser.
Keywords
"Detectors","Arrays","Imaging","Plasma temperature","Interference","Temperature sensors","Photothermal effects"
Publisher
ieee
Conference_Titel
Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on
ISSN
2162-2027
Electronic_ISBN
2162-2035
Type
conf
DOI
10.1109/IRMMW-THz.2015.7327891
Filename
7327891
Link To Document