Title :
Terahertz imaging with micro-bridge structure detector array and 2.52THz far infrared laser
Author :
Jun Wang;Jun Gou;Weizhi Li;Yadong Jiang
Author_Institution :
State Key Lab of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054 P. R. China
Abstract :
A room temperature operating terahertz (THz) detector with low thermal conductive micro-bridge structure is presented using metal thin film as THz wave absorber. Vanadium oxide is acted as thermal sensitive material and |TCR| of the film is ~2%/K. The detector array is fabricated on silicon substrate with read-out integrate circuit. THz wave transmission imaging could be obtained with the micro-bridge focal plane array and 2.52THz far infrared CO2 pumped laser.
Keywords :
"Detectors","Arrays","Imaging","Plasma temperature","Interference","Temperature sensors","Photothermal effects"
Conference_Titel :
Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on
Electronic_ISBN :
2162-2035
DOI :
10.1109/IRMMW-THz.2015.7327891
