Title :
Experimental investigation of powerful THz gyrotrons for initiation of localized gas discharge
Author :
M. Yu. Glyavin;S. V. Golubev;A. V. Sidorov;S. V. Razin;A. P. Fokin;A. G. Luchinin;A. G. Litvak;M. V. Morozkin;A. V. Vodopyanov;V. E. Semenov;E. I. Rakova;G. S. Nusinovich;A. I. Tsvetkov
Author_Institution :
Institute of Applied Physics RAS, Nizhny Novgorod, Russia
Abstract :
Results of experimental tests of a high-power sub-terahertz gyrotron with a pulse solenoid are presented. The operating frequency corresponds to the atmospheric transparency window (0.66-0.67 THz). The output power up to 200 kW in single 50 microsecond pulses was obtained. The 0.3THz/0.5 MW tube is under experimental tests. Gas discharges have been realized in a wide range of pressures (0.01-1500 Torr) and different gases. Such discharges can be used as the pointed source of UV/VUV radiation, including the projection lithography.
Keywords :
"Gyrotrons","Discharges (electric)","Fault location","Solenoids","Plasmas","Electron tubes"
Conference_Titel :
Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on
Electronic_ISBN :
2162-2035
DOI :
10.1109/IRMMW-THz.2015.7327893