• DocumentCode
    3691641
  • Title

    Detection properties of spiral-antenna-coupled microbolometer fabricated on Si3N4/SiO2 membrane at 200 GHz band

  • Author

    T. Uchida;A. Matsushita;T. Tachiki

  • Author_Institution
    National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Spiral-antenna-coupled Bi microbolometer was fabricated on a Si3N4/SiO2 membrane. The DC sensitivity of the device was 335 W-1 and the responsivity was 110 V/W at 220 GHz for Ib = 1.0 mA. These values are about 10 times higher than those of the Bi bolometer fabricated on a dielectric substrate. The NEP was estimated to be 4×10-10 W/Hz1/2 for a modulation frequency at 1 kHz.
  • Keywords
    "Antennas","Bismuth","Bolometers","Spirals","Sensitivity","Detectors","Substrates"
  • Publisher
    ieee
  • Conference_Titel
    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on
  • ISSN
    2162-2027
  • Electronic_ISBN
    2162-2035
  • Type

    conf

  • DOI
    10.1109/IRMMW-THz.2015.7327899
  • Filename
    7327899
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3691641