Intelligent sensitivity tracking of manufacturing tool tuning

The manufacturing processes in semiconductor industry can be enhanced to increase the yields and reduce the non-production wafers by maintaining the accuracy of the sensitivities for offline tool tuning. The turning values of most modules are usually calculated by utilizing design of experimental (DOE) data, which provide the sensitivity tables, and also the experiences of engineers. These sensitivity tables are not always suitable for tools due to various tool conditions. Therefore, a DOE-wafer-free methodology to track the integrity of sensitivity table is hereby proposed.