Title :
A review of variance amplifications by advanced process control
Author :
Keung Hui;Jason Mou
Author_Institution :
Taiwan Semiconductor Manufacturing Company, Limited 8, Li-Hsin Road VI, HsinChu Science Park, HsinChu, Taiwan, R.O.C.
Abstract :
As critical dimensions of semiconductor devices shrink towards 10n and smaller, applications of advanced process control (APC) solutions no longer reap large reductions of observed variances as it used to behave, sometimes with bare improvements or even deteriorations, consequently raising disgruntlement of the management.
Keywords :
"Metrology","Process control","Delays","Semiconductor device measurement","Transfer functions","Manufacturing","Production"
Conference_Titel :
Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & 2015 International Symposium on Semiconductor Manufacturing (ISSM), 2015
