• DocumentCode
    3691949
  • Title

    Tool log mining for productivity improvement — James Lin

  • Author

    Ji Fu Kung;Cecil Liu;Stephen Tseng;Y B Hsu

  • Author_Institution
    United Microelectronics Corporation No.18, 20, Nanke 2nd Rd., Tainan Science Park, Sinshih Dist. Tainan City, Taiwan 74147, R.O.C.
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In a high-mix production environment with thousands of recipes and hardware differences due to tool-dedications, it is not straightforward to identify throughput efficiency losses. As a result, it is very difficult to identify and exploit opportunities to improve equipment usage (i.e. “more wafers-per-hour”).1 A WTW-initiative was started in 2009 at ISMI to develop metrics to identify active and wait time elements contributing to non-productive cycle time.2
  • Keywords
    "Productivity","Data models","Big data","Text mining","Semiconductor device modeling","Measurement","Manufacturing"
  • Publisher
    ieee
  • Conference_Titel
    Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & 2015 International Symposium on Semiconductor Manufacturing (ISSM), 2015
  • Type

    conf

  • Filename
    7328909
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3691949