Title :
Tool log mining for productivity improvement — James Lin
Author :
Ji Fu Kung;Cecil Liu;Stephen Tseng;Y B Hsu
Author_Institution :
United Microelectronics Corporation No.18, 20, Nanke 2nd Rd., Tainan Science Park, Sinshih Dist. Tainan City, Taiwan 74147, R.O.C.
Abstract :
In a high-mix production environment with thousands of recipes and hardware differences due to tool-dedications, it is not straightforward to identify throughput efficiency losses. As a result, it is very difficult to identify and exploit opportunities to improve equipment usage (i.e. “more wafers-per-hour”).1 A WTW-initiative was started in 2009 at ISMI to develop metrics to identify active and wait time elements contributing to non-productive cycle time.2
Keywords :
"Productivity","Data models","Big data","Text mining","Semiconductor device modeling","Measurement","Manufacturing"
Conference_Titel :
Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & 2015 International Symposium on Semiconductor Manufacturing (ISSM), 2015
