Title :
Large-scale, MEMS-actauated silicon photonic switches
Author :
Ming C. Wu;Tae Joon Seok;Sangyoon Han;Niels Quack
Author_Institution :
Electrical Engineering and Computer Sciences Department and Berkeley Sensor and Actuator Center (BSAC), University of California, Berkeley Berkeley, CA 74720, U.S.A
Abstract :
Large-scale silicon photonic switches with high port counts (64×64) and low on-chip losses have been realized by integrating micro-electro-mechanical-system (MEMS) actuators with silicon photonics. The switch has fast (sub-microsecond) switching time, and has potential applications in reconfigurable networks for data-intensive computing.
Keywords :
"Optical switches","Silicon photonics","Optical losses","Micromechanical devices","System-on-chip"
Conference_Titel :
Photonics in Switching (PS), 2015 International Conference on
DOI :
10.1109/PS.2015.7328974
