Title :
Single-step dry-etched lateral PIN by using trench structure for optical mode switch
Author :
Ryan Imansyah;Luke Himbele;Haisong Jiang;Kiichi Hamamoto
Author_Institution :
Interdisciplinary Graduate School of Engineering Science, Kyushu University, 6-1, Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
Abstract :
Trench structure that enables lateral PIN with single-step dry-etching was exploited to optical mode switch for the first time. Successful current-injected (60mA) optical mode switching was confirmed with polarization independent characteristics.
Keywords :
"Optical switches","Optical device fabrication","Silicon","Optical waveguides","Etching","Optical filters","Optical refraction"
Conference_Titel :
Photonics in Switching (PS), 2015 International Conference on
DOI :
10.1109/PS.2015.7329010
