• DocumentCode
    3692080
  • Title

    Silica MEMS cantilever arrays

  • Author

    Peter G. R. Smith;Peter A. Cooper;James C. Gates;Christopher Holmes;Lewis G. Carpenter;P.L. Mennea

  • Author_Institution
    Optoelectronics Research Centre, University of Southampton, Southampton, UK
  • fYear
    2015
  • Firstpage
    333
  • Lastpage
    335
  • Abstract
    This invited paper covers the development of UV written MEMS cantilevers on silica-on-silicon. The work uses novel fabrication tools including physical micromachining and UV laser direct writing. Each cantilever contains an optical waveguide and by actuating the cantilevers we have demonstrated optical attenuation operation in an array format.
  • Keywords
    "Optical device fabrication","Optical fibers","Optical fiber sensors","Silicon"
  • Publisher
    ieee
  • Conference_Titel
    Photonics in Switching (PS), 2015 International Conference on
  • Type

    conf

  • DOI
    10.1109/PS.2015.7329044
  • Filename
    7329044
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3692080