Study on achievement of simultaneous X, Y movements and theta rotation using straight-move ultrasonic vibrators

High-performance machines such as optical microscope and direct drawing machine, etc. require very complicated movements to handle objects. We have proposed a novel ultrasonic motor to achieve both X- and Y-directional movements and theta-angle rotation simultaneously for optical microscope as an example. It has a new structure constructed with straight-move shafts attached to bimorph vibrators. Three shafts, i.e. one unit, are connected perpendicularly to make circular / elliptic / straight micro-motions of shaft tip by driving voltages to bimorphs. Peripheral circuits which supply driving voltages with arbitrary amplitudes and phases have also developed. Combining the circuits and above three units arranged triangle apexes, we have achieved a new ultrasonic motor which drive the stage to move and rotate simultaneously. These technologies can be applied other high-performance machines.