Investigation of surface-acoustic-wave atomization using phase Doppler anemometry

We developed surface acoustic wave (SAW) based atomizers. In our device, three functions, which were micro-pumps, a trench with a tank to feed and regulate the liquid, and faced arc-shaped interdigital transducers (AS-IDT) for atomization, were integrated on the surface of a piezoelectric chip (LiNbO₃). Directional point source atomization was achieved by exploiting the integrated trench and AS-IDTs. Also, as a result of evaluations with laser phase Doppler anemometry (PDA), distribution of the droplet diameter was monodisperse, and mean diameter, volume and velocity droplets were 14.0 μm, 1.4 pl, and 0.29 m/s, respectively, when applying acetone to the liquid for atomization.