• DocumentCode
    3692394
  • Title

    Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device

  • Author

    Mohanraj Soundara Pandian;Eloi Marigo;Muniandy Shunmugam;Rubiyatulniza Binti Hussain; Charlie Tay Wee Song;Jazril Bin Jamil Din; Chan Buan Fei;Venkatesh Madhaven;Arjun Kumar Kantimahanti;Aamir Farooq Malik;Varun Jeoti

  • Author_Institution
    SilTerra Malaysia Sdn Bhd, Kedah, MALAYSIA
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In this paper we present a study on the surface acoustic wave propagation performance and coupling coefficient for a non-planar thin film Surface Acoustic Wave device (SAW). Piezoelectric Aluminum Nitride (AlN) thin film is deposited on top of the Inter Digital Transducer (IDT) by a non conformal physical vapor deposition process. Non-planarity around the transducer impedes the wave propagation, this effect is investigated using SAW delay lines.
  • Keywords
    "Aluminum nitride","Surface acoustic waves","III-V semiconductor materials","Delay lines","Surface acoustic wave devices"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2015 IEEE International
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2015.0362
  • Filename
    7329385
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3692394