Title :
Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device
Author :
Mohanraj Soundara Pandian;Eloi Marigo;Muniandy Shunmugam;Rubiyatulniza Binti Hussain; Charlie Tay Wee Song;Jazril Bin Jamil Din; Chan Buan Fei;Venkatesh Madhaven;Arjun Kumar Kantimahanti;Aamir Farooq Malik;Varun Jeoti
Author_Institution :
SilTerra Malaysia Sdn Bhd, Kedah, MALAYSIA
Abstract :
In this paper we present a study on the surface acoustic wave propagation performance and coupling coefficient for a non-planar thin film Surface Acoustic Wave device (SAW). Piezoelectric Aluminum Nitride (AlN) thin film is deposited on top of the Inter Digital Transducer (IDT) by a non conformal physical vapor deposition process. Non-planarity around the transducer impedes the wave propagation, this effect is investigated using SAW delay lines.
Keywords :
"Aluminum nitride","Surface acoustic waves","III-V semiconductor materials","Delay lines","Surface acoustic wave devices"
Conference_Titel :
Ultrasonics Symposium (IUS), 2015 IEEE International
DOI :
10.1109/ULTSYM.2015.0362
