Precise positioning characteristics of multi-mode ultrasonic motor

Previously developed multi-mode ultrasonic motor has three driving modes, which are fast driving mode with figure-of-eight locus resonant vibration, impact driving with saw tooth wave form and DC voltage driving mode. The impact driving mode can be divided into two categories. One utilized resonant vibration (fast) and the other uses individual off resonance vibration (slow). For precise positioning, characteristics of stable driving of the slow impact driving mode and stroke of the DC mode are important. This paper reports the characteristics obtained through experiments.