Integral plus double integral synchronization control for multiple piezoelectric actuators

In this paper, an integral plus double integral synchronization controller is developed for multiple piezoelectric actuators through a state feedback approach. Dynamic modeling of the piezoelectric nanopositioner is conducted through both linear and nonlinear phenomenological models. The linear and nonlinear models are then used along with the experimental system to perform hardware in the loop (HITL) simulations of the synchronization controller for a parallel three-axis nanopositioning system. This would allow the piezoelectrics to form the basis of an ultra-precise 2-D Fabry-Perot interferometer as the gap spacing of the device could be controlled at the nanometer level.