ZnO nanorods on the 128LN substrate for surface acoustic wave sensors

This paper presented the new results of ZnO nanorods synthesis on 128-XY LiNbO3 substrate by low-temperature methods. It was shown that the quality of ZnO nanorods could be enhanced by post-growth thermal processing. ZnO nanorods were coated by Pt layer for selective detection of hydrogen. Application of ZnO nanorods increased the effective surface area and therefore sensitivity of the SAW sensor. Proposed sensor configuration could be applied in smart integrated sensor systems.