A novel miniature spatial hybrid compliant-paralleled mechanism for film micropump

Miniature actuators and methodologies play an important role in the performance of the film micro-pumps that could deliver high precision amount of the fluid. A common type of thin film micro-pump equips with film membrane in the asymmetry structure generating a polarization axial, which raises an inconvenient topic that has attracted increasing interest. This paper formulates and analyzes a novel spatial hybrid compliant mechanism with three chains in parallel with multiple-axis flexure hinges. In this design of miniature compliant-paralleled mechanism, a novel displacement magnification, has unique abilities of transmitting radial in-plane input displacements in parallel into centrally axial output deflection in out-plane and performs excellent in amplify ratio. In order to determine output generating deflection and stress intensity issue, Pseudo Rigid Body Model (PRBM) methodology and elastic mechanics are employed. In addition, in the parallel kinematic mechanism couples inputting parts which effectively decreases error ratio resulting from asynchrony of input amplitudes in parallel. To verify the performance of the miniature actuator, ANSYS is employed to simulate by the means of finite element analysis.