• DocumentCode
    3699838
  • Title

    A 300mm Si photonics platform for multi-applications

  • Author

    Tohru Mogami;Tsuyoshi Horikawa;Keizo Kinoshita;Hironori Sasaki;Ken Morito;Kazuhiko Kurata

  • Author_Institution
    Photonics Electronics Technology Research Association (PETRA), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
  • fYear
    2015
  • fDate
    6/1/2015 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A 300mm Si photonics platform has been established for optical multi-applications. For device fabrication process, the advanced CMOS technology can lead to the performance improvement of optical devices. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform and discussed them theoretically. 50×50mm2 large Si interposers with photonics electronics convergence technology were demonstrated by using this platform.
  • Keywords
    "Optical waveguides","Optical device fabrication","Optical filters","Optical crosstalk","Silicon","Photonics","Optical polarization"
  • Publisher
    ieee
  • Conference_Titel
    Opto-Electronics and Communications Conference (OECC), 2015
  • Electronic_ISBN
    2166-8892
  • Type

    conf

  • DOI
    10.1109/OECC.2015.7340291
  • Filename
    7340291
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3699838