Title :
High-performance BiCMOS Si photonics platform
Author :
D. Knoll;S. Lischke;A. Awny;M. Kroh;E. Krune;C. Mai;A. Peczek;D. Petousi;S. Simon;K. Voigt;G. Winzer;R. Barth;L. Zimmermann
Author_Institution :
IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany
Abstract :
Photonic BiCMOS is a novel technology for fabricating electronic-photonic integrated circuits. Broadband silicon photonics devices such as germanium photodiodes and depletion type Mach-Zehnder modulators were monolithically integrated in a high performance SiGe BiCMOS baseline process. Integration aspects and first examples of demonstrator circuits shall be reviewed.
Keywords :
"BiCMOS integrated circuits","Photonics","Silicon","Modulation","Silicon germanium","Substrates","Photodiodes"
Conference_Titel :
Bipolar/BiCMOS Circuits and Technology Meeting - BCTM, 2015 IEEE
DOI :
10.1109/BCTM.2015.7340583
