New ultra low ESR Mosa?c PICS capacitors for power conversion

This paper presents a new architecture of capacitive elements (MOSAIC), where the global capacitance is constructed out of a massive network of parallelized elementary cells. Electrical measurements in the RF domain are presented and show a very low ESR results combined with a high stability versus frequency up to hundreds of MHz. Being given that there is a trend towards higher frequencies for DC-DC converters and taking into account the electrical performances combined with the design flexibility, this paper demonstrates the benefits of using such Mosaic PICS capacitor for power conversion applications. These Mosaic trench capacitors could be a part of an IPDiA silicon interposer on top of which magnetic inductors and Power Management Integrated Circuits (PMIC) are flip chipped. Thick copper routing (up to 12μm) is used to connect the passive components to the PMIC.