Title :
Scanning microwave microscopy for nanoscale characterization of semiconductors: De-embedding reflection contact mode measurements
Author :
L. Michalas;A. Lucibello;G. Badino;C.H. Joseph;E. Brinciotti;F. Kienberger;E. Proietti;R. Marcelli
Author_Institution :
National Research Council, Institute for Microelectronics and Microsystems (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy
Abstract :
A methodology towards de-embedding contact mode scanning microwave microscopy (SMM) reflection measurements is presented. A calibration standard that consists of differently doped stripes is required, while the reflection coefficient amplitude |S11|, is modeled and analyzed in the linear scale, instead of the commonly adopted dB scale. This allows the straightforward experimental determination of important parameters such as the effective tip radius and the magnitude of stray capacitances. Values of 145 nm and 22 fF have been obtained respectively. The proposed methodology can be easily and repeatedly performed during the experimental procedure, offering in this way the necessary de-embedding to get an enhanced accuracy on SMM measurements for semiconductors characterization.
Keywords :
"Capacitance","Calibration","Microwave measurement","Microwave theory and techniques","Doping","Microscopy","Semiconductor device measurement"
Conference_Titel :
Microwave Conference (EuMC), 2015 European
DOI :
10.1109/EuMC.2015.7345724