DocumentCode
3704527
Title
Un-cooled resonant IR detectors based on Barium Strontium Titanate switchable FBARs
Author
Milad Zolfagharloo Koohi; Seungku Lee;Victor Lee;Seyit Ahmet Sis;Amir Mortazawi
Author_Institution
Dept. of Electr. Eng. &
fYear
2015
Firstpage
948
Lastpage
951
Abstract
In this paper Barium Strontium Titanate (BST) based thin film bulk acoustic tunable resonators (FBAR) are proposed for un-cooled infrared (IR) detection. Measured TCF as well as other important characteristics of BST based resonators are compared with the previously proposed IR resonant detectors. Optimized BST IR resonators, with their low conductivity, high TCF, and high quality factors can be a strong candidate for IR resonant sensor applications.
Keywords
"Detectors","Film bulk acoustic resonators","Temperature sensors","Thermal noise","Yttrium","Conductivity"
Publisher
ieee
Conference_Titel
Microwave Conference (EuMC), 2015 European
Type
conf
DOI
10.1109/EuMC.2015.7345921
Filename
7345921
Link To Document