CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue

CMOS-based neural tissue in-vivo recording chips with a purely capacitive interface are presented with 256 sites resp. 256 recording channels. A 3D post-CMOS ALD-based process allows to provide a highly efficient sensor dielectric and to realize a protective insulation layer for the non-active part of the fabricated devices. A simple interconnect-efficient sensor array topology is used. Electrical characterizations and in-vivo measurements with biological content reveal proper operation of the presented approach.