Sensitivity improvement of multipath optical ring resonators using silicon-on-insulator technology

In this paper, a multi-path optical ring resonator (MpORR) on silicon-on-insolator (SOI) is proposed for sensitivity enhancement in liquid chemical sensing applications. It is designed on Silicon Dioxide (SiO₂) substrate and Silicon material as the core of optical waveguides. The proposed multi-path optical ring resonator can be realized with a wide free spectral value (FSR) of 3 THz. Therefore, the sensitivity of the sensor can be enhanced. Analysis and optimization of the proposed multi-path optical ring resonator are discussed and reported for optical wavelength operation of 1550 nm. The proposed device can be used for identifying different liquid material precisely.