DocumentCode :
3710676
Title :
Physical properties of hydrothermal growth nanostructure metal titanium dioxide
Author :
M. R. Zakaria;N. Farahin;Rozana A. M. Osman;Sh. Nadzirah;A. H. Azman;U. Hashim;M. K. Md Arshad
Author_Institution :
School of Microelectronic Engineering, Universiti Malaysia Perlis (UniMAP), Arau, Perlis, Malaysia
fYear :
2015
Firstpage :
1
Lastpage :
4
Abstract :
Growth of titanium dioxide (TiO2) nanowires was studied on the seed layer of TiO2 through hydrothermal growth method. Here, the growth of nanowires TiO2 on Si (100) substrates by using the two steps method. Different seed layers of TiO2 were prepared by using sol-gel method, deposited by spin coating and annealing, followed by the growth of TiO2 nanowires by using the hydrothermal method. Acetic acid was used as a stabilizer to synthesize a TiO2 seed layer. The aim of this study was to understand the role of polycrystalline size on thin film towards the diameter of nanowires grown as a sensing area in Surface Acoustic Wave (SAW) Biosensor. The morphology and microstructure of the thin film seed layer and TiO2 nanowires were characterized using X-Ray diffraction (XRD), scanning electron microscope (SEM), field emission scanning electron microscope (FESEM) and atomic force microscopy (AFM).
Keywords :
"Nanowires","Substrates","Scanning electron microscopy","Annealing","Titanium","Biosensors"
Publisher :
ieee
Conference_Titel :
Micro and Nanoelectronics (RSM), 2015 IEEE Regional Symposium on
Type :
conf
DOI :
10.1109/RSM.2015.7355032
Filename :
7355032
Link To Document :
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