Title :
SOI multidirectional thermoelectric flow sensor for harsh environment applications
Author :
Andrea De Luca;Giorgia Longobardi;Florin Udrea
Author_Institution :
Engineering Department, University of Cambridge, 9 JJ Thomson Avenue, CB3 0FA, UK
Abstract :
In this paper we present a novel SOI CMOS multidirectional thermoelectric flow sensor. For the first time to the best knowledge of the authors, the sensor is shown to be able to cope with harsh environment conditions, such as 150 °C ambient temperature and humidity up to 75%.
Keywords :
"Temperature sensors","Humidity","Silicon","Stress","Heating","Temperature measurement"
Conference_Titel :
Semiconductor Conference (CAS), 2015 International
Print_ISBN :
978-1-4799-8862-4
DOI :
10.1109/SMICND.2015.7355173
