• DocumentCode
    3710851
  • Title

    Study of the von Mises stress in RF MEMS switch anchors

  • Author

    G. Boldeiu;D. Vasilache;V. Moagar;A. Stefanescu;G. Ciuprina

  • Author_Institution
    National Institute for Research and Development in Microtechnologies, 126A Erou Iancu Nicolae, 077190, Romania
  • fYear
    2015
  • Firstpage
    219
  • Lastpage
    222
  • Abstract
    In this paper an analysis of the von Mises stress in the RF MEMS switch structures is presented. This study was performed to analyze and optimize the stress in the anchors area for switch structures addressed to K and W frequency bands. Different types of anchors were taken into consideration and a comparison of von Mises stress has been performed. Optimization showed that it is possible to reduce stress up to more than 80% of its baseline, to the values much smaller than the breaking coefficient (100Mpa).
  • Keywords
    "Stress","Radio frequency","Microswitches","Optimization","Reliability","Springs"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2015 International
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4799-8862-4
  • Type

    conf

  • DOI
    10.1109/SMICND.2015.7355213
  • Filename
    7355213
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3710851