• DocumentCode
    3710852
  • Title

    On the models used for TCAD simulations of Diamond Schottky Barrier Diodes

  • Author

    N. Donato;M. Antoniou;E. Napoli;G. Amaratunga;F. Udrea

  • Author_Institution
    Engineering Department, University of Cambridge, CB2 1PZ, UK
  • fYear
    2015
  • Firstpage
    223
  • Lastpage
    226
  • Abstract
    In this paper we present a numerical analysis of Schottky Barrier Diodes (SBDs) based on CVD (Chemical Vapour Deposition) Diamond. Material and interface models suitable for TCAD (Technology Computer Aided Design) finite element simulations were implemented in the software and their validity was assessed against experimental results obtained on MIP+(Metal-Intrinsic layer-highly P doped substrate) SBDs with Al and Au as Schottky metal contacts both at room and higher temperature conditions. The paper also highlights the need to improve such TCAD models since the complex behavior of Diamond based devices is still not well captured in static and dynamic conditions. The present work also discusses the role of the Oxygen surface interface in the on state performances of the SBDs.
  • Keywords
    "Diamonds","Semiconductor process modeling","Temperature dependence","Fitting","Numerical models","Substrates","Mathematical model"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2015 International
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4799-8862-4
  • Type

    conf

  • DOI
    10.1109/SMICND.2015.7355214
  • Filename
    7355214