DocumentCode
3710861
Title
A comparative study by TCAD simulation for two different n-in-p silicon particle detector structures
Author
Mohammed Mekheldi;Slimane Oussalah;Abdenour Lounis;Nourredine Brihi
Author_Institution
Division Micro?lectronique et Nanotechnologie, Centre de D?veloppement des Technologies Avanc?es, Algiers, Algeria
fYear
2015
Firstpage
251
Lastpage
254
Abstract
This paper presents a comparative study for two different n-in-p silicon particle detector structures in the purpose of evaluating the breakdown voltage of unirradiated devices candidate for high luminosity applications. The two structures based on the n-in-p technology with and without p-spray isolation between guard rings have been simulated on high resistivity silicon wafers. The simulated electrical characteristics current-voltage, for both structures, are compared for various parameters like, substrate thickness, substrate doping, guard ring depth, guard ring doping, oxide thickness, and oxide charge, under similar conditions. From the results of the simulation, we conclude that, in terms of leakage current, both structures behave similarly but in terms of breakdown voltage, n-in-p technology with p-spray shows better performances.
Keywords
"Silicon","Substrates","Detectors","Doping","Structural rings","Semiconductor process modeling","Electric potential"
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2015 International
ISSN
1545-827X
Print_ISBN
978-1-4799-8862-4
Type
conf
DOI
10.1109/SMICND.2015.7355224
Filename
7355224
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