• DocumentCode
    3710861
  • Title

    A comparative study by TCAD simulation for two different n-in-p silicon particle detector structures

  • Author

    Mohammed Mekheldi;Slimane Oussalah;Abdenour Lounis;Nourredine Brihi

  • Author_Institution
    Division Micro?lectronique et Nanotechnologie, Centre de D?veloppement des Technologies Avanc?es, Algiers, Algeria
  • fYear
    2015
  • Firstpage
    251
  • Lastpage
    254
  • Abstract
    This paper presents a comparative study for two different n-in-p silicon particle detector structures in the purpose of evaluating the breakdown voltage of unirradiated devices candidate for high luminosity applications. The two structures based on the n-in-p technology with and without p-spray isolation between guard rings have been simulated on high resistivity silicon wafers. The simulated electrical characteristics current-voltage, for both structures, are compared for various parameters like, substrate thickness, substrate doping, guard ring depth, guard ring doping, oxide thickness, and oxide charge, under similar conditions. From the results of the simulation, we conclude that, in terms of leakage current, both structures behave similarly but in terms of breakdown voltage, n-in-p technology with p-spray shows better performances.
  • Keywords
    "Silicon","Substrates","Detectors","Doping","Structural rings","Semiconductor process modeling","Electric potential"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2015 International
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4799-8862-4
  • Type

    conf

  • DOI
    10.1109/SMICND.2015.7355224
  • Filename
    7355224