SiOx(C)/SiNx dual-layer anti-reflectance coating for improving solar cell efficiency

The SiO_x(C)/SiN_x dual-layer shows a better anti-reflection coating compared with standard SiN_x films, after deposition and annealing. In this paper, the effect of film thickness, sintering peak temperature, belt speed, etc. on the anti- reflectance of SiO_x(C) film were discussed. Under optimized condition, the weighted reflectance of SiO_x(C)/SiN_x dual-layer obtained 1.25% reduction; the efficiency of solar cell rises 0.35%. Sixty solar cells with dual-layer encapsulated modules gained 0.5 W larger power as well as better light stability than the ones with SiN_x single layer.