DocumentCode :
3713843
Title :
A study of nano structure by roll to roll imprint lithography
Author :
S. Hassan;M.S. Yusof;M.I. Maksud;M.N. Nodin;N.A. Rejab;K.A. Mamat
Author_Institution :
Faculty of Mechanical and Manufacturing Engineering, Universiti Tun Hussein Onn Malaysia, Batu Pahat, Johor, Malaysia
fYear :
2015
Firstpage :
132
Lastpage :
135
Abstract :
Imprint lithography process is a unique printing technique that create graphic, electronic and biomedical printed on substrates. PET plastics are an example of materials that can be used as printing substrate in producing nano-scale electronic and medical devices. Here, it is proposed that extending imprint lithography technique into the multiple nano-structure printing fine solid lines onto substrate. Imprint lithography is a low cost printing technique commonly used in manufacturing and printing industry. This study exhibit successful fine solid lines imprinting below 1 micrometer in line width, gap and height on polyethylene-terephthalate (PET) substrate. This paper illustrates the use of imprint lithography method in producing multiple nano-solid lines printing capability as application of printing electronic, graphic and bio-medical.
Keywords :
"Printing","Lithography","Substrates","Positron emission tomography","Plastics","Silicon","OFETs"
Publisher :
ieee
Conference_Titel :
Technology Management and Emerging Technologies (ISTMET), 2015 International Symposium on
Type :
conf
DOI :
10.1109/ISTMET.2015.7359016
Filename :
7359016
Link To Document :
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