Comb IDE patterned piezoelectric MEMS cantilever for sensing applications

Power scavenging is a method of extracting energy from the surrounding and converting it into electrical energy. In this paper two element array of dimensions 30×4 μm² with IDE pattern on top is proposed. An insulation layer of SiO₂ is sandwiched in between Si and PZT layer. This layer provides the bow control of cantilever beam. Cantilever array is simulated using COMSOL multiphysics. The effect of various parameters on the performance of cantilever beam is studied. Effect of thickness of PZT layer and length of the cantilever on displacement and stress generated across the cantilever is studied.