• DocumentCode
    3715753
  • Title

    Internal model control for high-speed spiral scan AFM

  • Author

    Ali Bazaei;Yuen Kuan Yong;S. O. Reza Moheimani

  • Author_Institution
    School of Electrical Engineering & Computer Science, University of Newcastle, Callaghan, NSW 2308, Australia
  • fYear
    2015
  • Firstpage
    206
  • Lastpage
    209
  • Abstract
    We report on a novel application of internal model control for accurate tracking of a high speed spiral trajectory in scanning probe microscopy. With a closed-loop bandwidth of only 1 kHz, we achieved tracking errors as low as 0.31% of the scan diameter and an ultra-video frame rate of 37.5 frames per second (FPS) for a high pitch spiral trajectory generated by amplitude modulation of 3 kHz sinusoids.
  • Keywords
    "Spirals","Trajectory","Nanopositioning","Microscopy","Frequency control","Force"
  • Publisher
    ieee
  • Conference_Titel
    Control Conference (AUCC), 2015 5th Australian
  • Type

    conf

  • Filename
    7361934
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3715753