Internal model control for high-speed spiral scan AFM

We report on a novel application of internal model control for accurate tracking of a high speed spiral trajectory in scanning probe microscopy. With a closed-loop bandwidth of only 1 kHz, we achieved tracking errors as low as 0.31% of the scan diameter and an ultra-video frame rate of 37.5 frames per second (FPS) for a high pitch spiral trajectory generated by amplitude modulation of 3 kHz sinusoids.