Development of a supporting system for visual inspection of IGBT device based on statistical feature and complex multi-resolution analysis

Recently, the necessity of environmental regulation, low fuel consumption, and natural energy development is proposed by environmental issues. So the demands of power transistor devices are increased. But measurement technique of the current distribution is not keeping up with further miniaturized and integrated were needed in present condition. Now, therefore, ensuring security attended high functionalization is a subject. IGBT (Insulated Gate Bipolar Transistor) is the device that used for wide range of power devices. So we are developing imaging system used non-contact sensor arrays aimed to IGBT production line. In this paper, we propose a development of a supporting system for visual inspection of IGBT device based on statistical feature and complex multi-resolution analysis. First, this performs signal de-noising after entering well-known good data and measured data. Second, the statistical feature is expressed the difference between good data and measured data are calculated. Last, classifying of good and inferiority is performed based on the result of threshold processing. In the paper, we applied our algorithm to 28 sample data including 20 good data and 8 inferiority data.