The measurement uncertainty evaluation of a reversal error for the ALSM

Most recently, the measurement uncertainty evaluation employs entirely for evaluating the measurement process which is also use to investigate the residual error of length measuring system. This paper presents the measurement uncertainty of the reversal errors that would be compensated by using the error with the measurement uncertainty compensation module. The confident level of measurement uncertainty is approximately 95%. This evaluation result of the measuring system errors were approximately minimized to 8.0 μm.