Emerald? UV Laser Drilling system (IMPACT 2015)

The Emerald™ is a high-accuracy, high-speed UV Laser Drilling system. It creates microvias on a variety of materials such as metal, passivation, mold compounds, and dielectric layers. With a minimal spot size of 15μm, the system drills small vias down to 18um with position accuracy down to 6um at Cpk=1.33 (4σ) at very high speeds of more than 3,500 vias per second on standard ABF substrates. For fc-BGA we demonstrate high quality vias, smaller than 35μm in diameter in ABF with tight position accuracy and >75% taper. For fc-CSP we can produce high quality vias of 45μm diameter and below in copper-plated PrePeg with smooth via walls and no hangover, at a high-speed and low TCO, demonstrating a competitive cost per via against CO2-based laser drilling technologies.