Desiging a high speed electrostatic micro-actuator with an electrical stopper useable for biological microinjection

In this paper we have proposed an electrostatic micro-actuator able to reach high velocity in short time in one direction and stop with less damage and recoil in desired position without mechanical stopper. This device would be applicable in many applications such as optical switching and biological microinjection. In many cases which high velocity micro-actuator needed mechanical stopper had been used to prevent the device to move further. This kind of stopper may decrease the repeatability and reliability of the device because no impact would occur. Therefore we are to find a new way in order to stop the device without a mechanical stopper by an electrical stopper and improve the repeatability of the device and stops the end effector at the desire position with minimum delay and error. This device is composed of micro-actuator, suspension beam and an electrical stopper. These components would be designed in a way that the whole structure achieve high velocity capable of travel long distance with less tendency for system to bend. Also, mechanical specification is included efficient mass, suspension beams that worked as spring and specification of comb drive fingers which cause electrostatic force for driving the end effector would be discussed.