• DocumentCode
    3721788
  • Title

    A monolithically integrated multi-sensor platform

  • Author

    N. Banerjee;A. Banerjee;N. Hasan;S. S. Pandey;B. P. Gogoi;C. H. Mastrangelo

  • Author_Institution
    Department of Electrical and Computer Engineering, University of Utah, Salt Lake City, USA
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    The integration of multiple sensors on a single substrate is reported in this paper. A test chip was designed using the integration platform that implemented a capacitive inertial sensor, a capacitive absolute pressure sensor and a capacitive microphone. The sensors were tested after fabrication with the measured acceleration sensitivity of 10fF/g for a full scale acceleration of 2g and the pressure sensor sensitivity of 10fF/KPa for a full scale pressure of 1 atmosphere.
  • Keywords
    "Accelerometers","Pressure sensors","Microphones","Capacitance","Electrodes","Acceleration"
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2015 IEEE
  • Type

    conf

  • DOI
    10.1109/ICSENS.2015.7370324
  • Filename
    7370324
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3721788