Title :
A monolithically integrated multi-sensor platform
Author :
N. Banerjee;A. Banerjee;N. Hasan;S. S. Pandey;B. P. Gogoi;C. H. Mastrangelo
Author_Institution :
Department of Electrical and Computer Engineering, University of Utah, Salt Lake City, USA
Abstract :
The integration of multiple sensors on a single substrate is reported in this paper. A test chip was designed using the integration platform that implemented a capacitive inertial sensor, a capacitive absolute pressure sensor and a capacitive microphone. The sensors were tested after fabrication with the measured acceleration sensitivity of 10fF/g for a full scale acceleration of 2g and the pressure sensor sensitivity of 10fF/KPa for a full scale pressure of 1 atmosphere.
Keywords :
"Accelerometers","Pressure sensors","Microphones","Capacitance","Electrodes","Acceleration"
Conference_Titel :
SENSORS, 2015 IEEE
DOI :
10.1109/ICSENS.2015.7370324
