A temperature compensation method for micromachined thermal gas gyroscope

This paper presents a novel temperature compensation technology to overcome the problem of temperature drift for micromachined thermal gas gyroscopes. The compensation methodology utilizes an alternating constant-temperature-difference (CTD) operation circuit to thermally drive gas motion for stabilizing the sensor scale-factor and reducing the bias temperature sensitivity of the gyroscope. Compared with other compensation methods for gyroscopes, which generally rely on temperature calibration and eliminate the temperature drift through algorithm-based compensation, the proposed method can realize self-sustained temperature compensation through an analog circuitry, which is easily operated and with good stability. Experimental results validated that the temperature dependences of the scale-factor and bias of the thermal gas gyroscope were effectively reduced.