Optimal geometry of CMOS voltage-mode and current-mode vertical magnetic hall sensors

Four different geometries of a vertical Hall sensor are presented and studied in this paper. The current spinning technique compensates for the offset and the sensors, driven in current-mode, provide a differential signal current for a possible capacitive integration over a defined time-slot. The sensors have been fabricated using a 6-metal 0.18μm CMOS technology and fully experimentally tested. The optimal solution will be further investigated for bendable electronics. Measurement results of the four structures over the 10 available samples show for the best geometry an offset of 41.66 ± 8 μT and a current-mode sensitivity of 9 ± 0.1 %/T. Since the figures widely change with geometry, a proper choice secures optimal performance.