Miniature self-calibrated fiber optic tip temperature and pressure sensor

This paper reports a miniaturized fiber optic (FO) sensor developed using microfabrication technology. In this device, the temperature and pressure measurements are incorporated into a single point fiber tip sensor. The temperature-pressure cross sensing issue, a common problem in air gap pressure sensors, is addressed by self-calibrating with the integrated temperature sensor. The sensing element is approximately 300 μm. Signal demodulation was based on an optical white light interferometry algorithm.