Title :
The effect of electrolyte concentration on the characteristics of MEMS based electrochemical seismic sensors
Author :
Guanglei Li;Junbo Wang;Deyong Chen;Yonghao Xing;Jian Chen
Author_Institution :
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Science, Beijing, China
Abstract :
This paper first investigates the effect of electrolyte concentration on the characteristics of the MEMS based electrochemical seismic sensors by experimental method. Testing for the frequency response and sensitivity of the sensor were carried out and experimental results were discussed. Then the relationships between the characteristics and the electrolyte concentration of the sensor are illustrated. It is demonstrated that the characteristics of the seismic sensor depends on the concentration of I2 mostly.
Keywords :
"Sensor phenomena and characterization","Micromechanical devices","Sensitivity","Mechanical sensors","Electrodes","Frequency response"
Conference_Titel :
SENSORS, 2015 IEEE
DOI :
10.1109/ICSENS.2015.7370402
