A milli-volt triggered MEMS paddle switch

This paper presents an implementation of an electrostatic MEMS switch which can be triggered by a very low input voltage in the range of ~50mV. This device can thus be used as a zero-DC power signal threshold detector suitable for waking up larger battery powered systems. The device consists of an electrically conductive torsional see-saw paddle with four balanced electrodes. The device is symmetrically biased by applying the same voltage at its inner electrodes leading to bistable behavior at flat or collapsed equilibrium positions. The use of elevated symmetric bias softens the springs such that the transition of the paddle state from flat to collapsed can be triggered when a few mV are applied to one of its outer electrode thus causing device snapping in and switch closure.