Study on the PZT diaphragm actuated multiple jet flow in a circulatory miniaturized system

In this paper, we report on the design, simulation and experimental validation of a miniaturized device that can generate multiple jet flows circulated in a confined system. The device has a flow network comprised of four symmetrical working chambers connected with a pump chamber which is actuated by a PZT diaphragm. The flows in the device are simulated using OpenFOAM and actual performance of the device is experimental investigated. Generated flow with velocity of up to 1.0 m/s (at driving voltage of 10 Vpp) was verified by the hotwires embedded in each working chamber. The finding form this study can contribute to the development of multi-axis fluidic inertial sensors, fluidic amplifiers, and gas mixing, coupling and analysis.