Evaluating contact force based on displacement measurement of cantilever beams for MEMS switches and sensor applications

The low level of contact force, typical <;1mN, used in MEMS switches or relays, is often inferred from computational models based on the design geometry of the device. In this work we propose two methods to measure the contact force. The methods combine experimental measurements of cantilever beam displacement with computational models. Further to this we analyze the contact resistance of the beam in contact with a fixed and compliant surface. The fixed surface is Au coated Si, while the compliant surface is Au coated carbon nanotube surface designed to for electrical contact and low force sensing applications.